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The purpose of this Document is to provide specification for hydrogen chloride (HCl) that is used in the semiconductor industry
Additional layers on the surface of the silicon wafer
SEMI G94 — Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer
and delivery conditions should be taken into account when planning the testing
C02900 - SEMI C29 - Specification and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) Revision:SEMI C29-0618 - Inactive The purpose of this DocumentNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to standardize requirements for 4. 9% hydrofluoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to
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