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E14300 - SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法 Revision:SEMI E143-0306 (Reapproved 0512) - Superseded equipment and testing to ensure

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Description

equipment and testing to ensure an unified terminology for this technology

the consumers) without the need to send the data multiple times to multiple destinations

silicon nitride based layers by atomic layer deposition

This Terminology Document covers definitions of terms used in MEMS technology

E14300 - SEMI E143 - 50Ωの負荷に対する出力変動の測定およびすべての位相角において電圧定在波比が2.0の負荷に対する出力変動とスペクトルを測定するための試験方法 Revision:SEMI E143-0306 (Reapproved 0512) - Superseded equipment and testing to ensureNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Metrics Global Technical Committee20111224global Audits and Reviews Subcommittee20125www. semiviews. org www. semi. org20063 : SEMI E113 (RF) RF RFRF3SEMI E113 RF (50 ) 1% () RF10%100%0. 33 (VSWR2. 0) 1. 5%() 10%100%0. 33 (VSWR2. 0)

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