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Current edition approved by the Japanese Regional Standards Committee on February 1
SEMI M38-0312 (technical revision)
SEMI MF723-0307E (Reapproved 0412)
This Guide can also assist producers and users of TSV metrology to develop products and conduct meaningful evaluations
T01800 - SEMI T18 - Specification of Parts and Components Traceability Revision:SEMI T18-1106 - Superseded Current edition approved by theThe purpose of this Document is to provide standard means to collect and manage data to estimate lifetime or remaining time before such maintenance as calibration, cleaning and replacement more accurately. The final goal of the Standard is to realize the traceability of semiconductor, flat panel display (FPD), or MEMS devices with tracing parts and or components of their manufacturing equipment, including jigs and some consumable materials. This