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specific leadframe type such as QFP
and oxidizing gas
This method is to be used with ANSI/ISAS75
SEMI C27-0708 (technical revision)
E03300 - SEMI E33 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) StdDcs-Replaced specific leadframe type such as1 Purpose 1. 1 The purpose of this Guide is make recommendations to help assure that manufacturing equipment used for manufacturing semiconductor devices will operate reliably without failures caused by electromagnetic interference (EMI). This desired characteristic is generally known as electromagnetic compatibility (EMC). 2 Scope 2. 1 This Guide applies to equipment constructed for the purpose of manufacturing semiconductor devices. Equipment types
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