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This Standard will also insure interchangeability at all mechanical interfaces within process tools as well as with transportation and automation cassettes
FPD用ガラス基板の有効範囲外に刻印されるマーキングシンボルの位置・寸法・情報量を規定する。
SEMI D6-0211 (technical revision)
The purpose of this Standard is to support RMS in the following aspects:
M08700 - SEMI M87 - Test Method for Contactless Resistivity Measurement of Semi-Insulating Semiconductors Revision:SEMI M87-0116 - Superseded This Standard will also insureThe purpose of this Test Method is to specify methods for the contactless measurement of the resistivity of semi insulating samples and wafers. This Test Method covers the determination of the electrical resistivity of semi insulating semiconductors, including GaAs, InP, CdTe, Cd(Zn)Te, SiC, GaN, and AlN, within the resistivity range 1E5 to 1E12 cm. It may also be used to characterize other materials exhibiting resistivity in this range, including in
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