F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse Revision:SEMI F116-0821 - Current 本安全基準之目的係在從供應至排除設定易燃性矽化合物貯存、處理及使用之最低安全與衛生標準。

本安全基準之目的係在從供應至排除設定易燃性矽化合物貯存、處理及使用之最低安全與衛生標準。

이에 생산 장비와 AMHS 간의 병렬 입/출력(PI/O) 컨트롤(control) 신호는 생산 장비 로드 포트에서 보다 안정적이고 효율적인 캐리어(carrier) 핸드오프(handoff) (로드/언로드)를 위해 제정되어야 한다

and installation of equipment

SEMI G56-93 (Reapproved 0811)

F11600 - SEMI F116 - Guide for Drain Segregation for Semiconductor Manufacturing Tools to Support Site Water Reuse Revision:SEMI F116-0821 - Current 本安全基準之目的係在從供應至排除設定易燃性矽化合物貯存、處理及使用之最低安全與衛生標準。This Guide provides definitions and recommendations for design of drain segregation to enable water reuse in a semiconductor manufacturing facility. It is intended to establish a common basis for developing design specifications and decisions concerning planning and design of water reuse systems. This Guide also includes implications for the water reclamation and reuse systems configurations. This Guide is recommended to be used by semiconductor