S01400 - SEMI S14 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment Revision:SEMI S14-0200 - Superseded condition the factory

condition the factory

This Document provides a common basis for communication between manufacturers and users

3  Background

SEMI E39 — Object Services Standard (OSS)

S01400 - SEMI S14 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment Revision:SEMI S14-0200 - Superseded condition the factoryThis Safety Guideline provides considerations to the manufacturers of semiconductor manufacturing equipment that will assist them in assessing and mitigating the risk to equipment and product associated with fire and combustion by products. Although this Safety Guideline is written in the form of an assessment tool, it is intended for use throughout the design and development of semiconductor manufacturing equipment. This Safety Guideline may also be