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SEMI P5-0704 (technical revision)
This only includes equipment that handles reticles both in and outside of a reticle pod
by defining the experimental method and explaining the analysis
SEMI M38-0307 (technical revision)
SEMI103 Hybrid Integration Techniques for Flexible Electronics StdTpc-Automated Material Handling Systems SEMI P5-0704 (technical revision)TCourse Description This course describes techniques practiced at Palo Alto Research Center for fabricating flexible hybrid electronics. Topics include printing interconnects, logic circuits and resistors, bonding integrated circuits, and integrating sensors of different types. The techniques are illustrated with various examples of wireless sensor prototypes on flexible substrates and also the development of electronics on textiles. Course Objectives
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