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P03200 - SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法 Revision:SEMI P32-1104 - Inactive and a Sensor/Actuator Network Communication

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Description

and a Sensor/Actuator Network Communication Specification

• A handoff interface that transfers a Material and its Material Data simultaneously between adjacent equipment

and (2) of a material for which both the refractive index and the absorption coefficient are known at the measurement wavelength

These specified materials are intended for growing of single crystalline ingots and casting or other methods of growing multicrystalline Si

P03200 - SEMI P32 - フォトレジスト中のトレースメタル定量のための試験方法 Revision:SEMI P32-1104 - Inactive and a Sensor/Actuator Network CommunicationNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2004723Japanese Regional Standards Committee20048www. semi. org20041119989 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to

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