C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) StdTpc-Glass Wafer SEMI E37-0298 (technical revision)

SEMI E37-0298 (technical revision)

Some inspection equipment may generate

SEMI 3D4 — Guide for Metrology for Measuring Thickness

18 and SEMI C3

C00345 - SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional) StdTpc-Glass Wafer SEMI E37-0298 (technical revision)This Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1992. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hexafluoroethane is one of the most stable of all organic compounds. It is inert, colorless, nonflammable, odorless and tasteless. Referenced SEMI Standards None.