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SEMI D38-0624 (technical revision)
SEMI A1-0617 (first published - replaces SEMI PV35)
4 of this Document
静電気の数々の制御方法は，静電気を許容レベルにまで制御するために装置設計に組み込むことができる。装置製造の問題は，SEMI E78で述べている。
E04000 - SEMI E40 - Specification for Processing Management Revision:SEMI E40-0226 - Current SEMI D38-0624 (technical revision)* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1