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The scope of this Specification and Guide is five Grades and one Tier of hydrogen peroxide used in the semiconductor industry
SEMI 3D10 — Guide to Describing Materials Properties for Intermediate Wafers for Use in a 300 mm 3DS-IC Wafer Stack
In neither case shall the gas be considered as of higher quality than that defined by the specification
The in-line components applicable are valves (pneumatic
C00305 - SEMI C3.5 - Standard for Nitrogen (N2), Bulk Liquid, 99.998% Quality StdPbc-0822 The scope of this SpecificationThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www. semi. org in September 1999; originally published in 1981; previously published in 1993. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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