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D05200 - SEMI D52 - 基板IDの基準位置に関する仕様 StdPbc-0515 Derived from liquid air by

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Description

Derived from liquid air by fractional distillation

SEMI 3D10-0814 (Reapproved 0420)

This standard was technically approved by the global Flat Panel Display Committee

[Single edition]

D05200 - SEMI D52 - 基板IDの基準位置に関する仕様 StdPbc-0515 Derived from liquid air byglobal Flat Panel Display Factory Automation Committee 2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM E 200896. 1. 3 6. 1. 4 D32IDIDD32ID ID2 IDIDID Referenced SEMI Standards None.

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